Characterization of electron cyclotron resonance hydrogen plasmas
نویسندگان
چکیده
منابع مشابه
Electron Plasmas Cooled by Cyclotron-Cavity Resonance.
We observe that high-Q electromagnetic cavity resonances increase the cyclotron cooling rate of pure electron plasmas held in a Penning-Malmberg trap when the electron cyclotron frequency, controlled by tuning the magnetic field, matches the frequency of standing wave modes in the cavity. For certain modes and trapping configurations, this can increase the cooling rate by factors of 10 or more....
متن کاملHydrogen Incorporation and Crystallization of Nanocrystalline Silicon Deposited by Electron Cyclotron Resonance Plasmas
Nanocrystalline silicon layers have been deposited by electron cyclotron resonance chemical vapor deposition from silane as precursor. Although hydrogen was not deliberately introduced in the plasma it was incorporated in the grown layers as evidenced by the presence of a main infrared absorption band around 2100 cm21 with a shoulder at 2000 cm21. This suggests that most of the hydrogen is bond...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
سال: 1991
ISSN: 0734-2101,1520-8559
DOI: 10.1116/1.577350